MASS-VIEW flow meters can measure humid air.
Humid air can be seen as a mixture of water and air. The physical properties of the mixture will differ from those of dry air. Therefore, the inaccuracy of a thermal mass flow meter calibrated for dry air could increase when humid air is applied instead of dry air.
What we have seen is that as long as there is no condensation the inaccuracy caused by humidity is less than 0.1% FS for models MV-104, MV-106, MV-304 and MV-306 and 0.3%FS for models MV-102 and MV-302.
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