FF-101 FLEXI-FLOW 5 mln/min
- 8 pre-installed gases, 22 gases available via Bronkhorst FlowSuite
- Flow and Temperature measurment
- Compact design
- Up to 16 bar(g)
- Bluetooth and USB-C connection with free software Bronkhorst FlowSuite
- Fast response due to TCS technology
Bluetooth connectivity
Multiple Gases
Pre-installed gases
| Gases | max. range |
|---|---|
| N2,Air, H2, Ar | 5 mln/min |
| O2 | 4.5 mln/min |
| CH4 | 4 mln/min |
| He | 7 mln/min |
| CO2 | 3.5 mln/min |

With free software Bronkhorst FlowSuite you can add one of the 22 available gases or create mixtures on to the instrument.
This way you have a multi fluid instrument for your application:
C₂H₂, Air, C₃H₄ #1, Ar, CO₂, CO, C₃H₆ #1, D₂ #1,
C₂H₆, C₂H₄, He, H₂, Kr, CH₄, Ne, N₂, N₂O, O₂, C₃F₈,
C₃H₆ #2, C₃H₈, C₃H₄ #2
You can easily connect the instrument to your phone via Bluetooth and use it with the app.
Alternatively, the instrument can be connected to a PC using the appropriate cables.
Read here to learn how to connect the FLEXI-FLOW to your PC.
Features of FF-101 FLEXI-FLOW 5 mln/min
- Multi parameter output Actual mass flow and Temperature (instrument)
- Usable for virtually every kind of gas or gas-mix
- Simple and secure connection through Bluetooth or USB-C
- Advanced diagnostics functionalities
- High accuracy through on-board gas database and real-time conversion
- Easy to configure
- MTBF 145 years
- Unique TCS (Through Chip Sensor)
- Fast response <30ms
- Compact design
- On request controllers available via our distributors
- Namur NE107 status indication
Technical specifications
Measurement / control system
Flow range
0.4...
200
mln/min
Accuracy
±0.8% Rd plus ±0.2% FS (N2/Air/O2)
Repeatability
< ± 0,2% Rd
Turndown ratio
1:500
Pressure rating (PN)
16 bar(g) (232 psi(g))
Temperature rating
0 … 50 °C (32°F … 122°F)
Operating pressure
0.8…17 bar(a)
Pre-installed gases
Air, Ar, C2H2, C2H4, C2H6, C3F8, C3H4, C3H4, C3H6, C3H6, C3H8, CH4, CO, CO2, D2, H2, He, Kr, N2, N2O, Ne, O2
Standard calibration gas
N2
Response time (sensor)
<30 ms
Temperature coefficient
Flow sensor: zero 0.015% FS/ºC; span 0.05%Rd/ºC; Pressure sensors: zero 0.16 mbar/ºC;span 0.05% Rd/ºC
Leak integrity, outboard
Typical < 2 x 10-9 mbar l/s He
Attitude sensitivity
Mounting any position, attitude sensitivity negligible
Pressure sensitivity
standard: < 0.15% Rd/bar typical N2; withpressure correction: typical factor 5 improved
Mechanical parts
Material (wetted parts)
aluminium, stainless steel, silicon nitride, epoxy, aluminiumoxide, glass
Test pressure
25 bar(g)
Max. ΔP
16 bar(d)
Process connections
1/8"BSPP female thread (ISO1179-1)
Sealing material
FKM 51415
Weight
250 grams
Ingress protection
IP40
Electrical properties
Power supply
+24 VDc ± 10%
Max. power consumption
2.5 Watt (typical, in control)
Digital Communication
Modbus-RTU / FLOW-BUS
Electrical connection
9-pin D-sub male
Downloads
Brochure & Certificate
Manuals
Hook-up diagrams & Flow table
Applications
Reactive sputtering
- Fast follow-up of setpoints for layer thickness and transparency control
- Large dynamic range for flexibility within the application
Analytical equipment
- Trace Elemental Analysis, Gas Chromatography, ICP Spectroscopy, OES Spectroscopy, Mass Spectrometry
- Excellent repeatability and long-term stability
- Analytical grade; low outgassing. Fast flow control, also at very low flow rates.
Fuel cell
- Very accurate and repeatable over short-term and long-term for H2, Air, O2 and CO2 flow measurement and control
- Fast response flow measurement and control for accuracy at any time
- Large dynamic range flow measurement and control for accuracy over a wide flow range
- Compact for space-restricted mobile applications