FF-101 FLEXI-FLOW 5 mln/min
- 8 pre-installed gases, 22 gases available via Bronkhorst FlowSuite
- Flow and Temperature measurment
- Compact design
- Up to 16 bar(g)
- Bluetooth and USB-C connection with free software Bronkhorst FlowSuite
- Fast response due to TCS technology
Bluetooth connectivity
Multiple Gases
Pre-installed gases
| Gases | max. range |
|---|---|
| N2,Air, H2, Ar | 5 mln/min |
| O2 | 4.5 mln/min |
| CH4 | 4 mln/min |
| He | 7 mln/min |
| CO2 | 3.5 mln/min |

With free software Bronkhorst FlowSuite you can add one of the 22 available gases or create mixtures on to the instrument.
This way you have a multi fluid instrument for your application:
C₂H₂, Air, C₃H₄ #1, Ar, CO₂, CO, C₃H₆ #1, D₂ #1,
C₂H₆, C₂H₄, He, H₂, Kr, CH₄, Ne, N₂, N₂O, O₂, C₃F₈,
C₃H₆ #2, C₃H₈, C₃H₄ #2
You can easily connect the instrument to your phone via Bluetooth and use it with the app.
Alternatively, the instrument can be connected to a PC using the appropriate cables.
Read here to learn how to connect the FLEXI-FLOW to your PC.
Features of FF-101 FLEXI-FLOW 5 mln/min
- Multi parameter output Actual mass flow and Temperature (instrument)
- Usable for virtually every kind of gas or gas-mix
- Simple and secure connection through Bluetooth or USB-C
- Advanced diagnostics functionalities
- High accuracy through on-board gas database and real-time conversion
- Easy to configure
- MTBF 145 years
- Unique TCS (Through Chip Sensor)
- Fast response <30ms
- Compact design
- On request controllers available via our distributors
- Namur NE107 status indication
Technical specifications
Measurement / control system
Flow range
0...
5
mln/min
Accuracy
±0.8% Rd plus ±0.2% FS (N2/Air/O2)
Repeatability
< ± 0.2% Rd
Turndown ratio
1:500
Pressure rating (PN)
16 bar(g) (232 psi(g))
Temperature rating
0 … 50 °C (32°F … 122°F)
Operating pressure
0.8…17 bar(a)
Multi fluid capability
Embedded gas data for 22 gases and custom mixtures of these gases
Pre-installed gases
Air, Ar, C2H2, C2H4, C2H6, C3F8, C3H4 #1, C3H4 #2, C3H6 #1, C3H6 #2, C3H8, CH4, CO, CO2, D2, H2, He, Kr, N2, N2O, Ne, O2
Standard calibration gas
N2
Response time (sensor)
<30 ms
Operating temperature
0…+50 °C (32 - 122°F)
Temperature coefficient
Flow sensor: zero 0.015% FS/ºC; span 0.05%Rd/ºC; Pressure sensors: zero 0.16 mbar/ºC;span 0.05% Rd/ºC
Leak integrity, outboard
Typical < 2 x 10⁻⁹ mbar l/s He
Attitude sensitivity
Can be mounted in any position; attitude sensitivity is negligible.
Pressure sensitivity
standard: < 0.15% Rd/bar typical N2; with pressure correction: typically improved by a factor of 5
Settling time (in control, typical)
<150 ms
Control stability
< ± 0.1% FS (typical for 1 ln/min N2)
Long term stability
<0.5% FS over period of 3 years, then <0.2% FS per year
Pressure range sensor
0...17 bar(a)
Leak-by through closed valve
typical <5.10-5 mbar·l/s He
Warm-up time
< 1 minute
Storage / transport conditions
0...+50°C, max. 95% RH (non-condensing)
Marking
CE, RoHS, WEEE, REACH
Mechanical parts
Material (wetted parts)
aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Test pressure
25 bar(g)
Max. ΔP
16 bar(d)
Process connections
1/8"BSPP female thread (ISO1179-1)
Sealing material
FKM 51415
Weight
250 grams
Ingress protection
IP40
Plunger material
FFKM with PI (polyimide) foil
Surface roughness wetted parts
<1.6 μm Ra (<0.8 μm Ra for stainless steel body)
Electrical properties
Power supply
+24 VDc ±10%
Max. power consumption
2.5 Watt (typical, in control)
Digital Communication
Modbus RTU / FLOW-BUS
Electrical connection
9-pin D-sub male
Service interface
USB-C, Bluetooth
Downloads
Brochure & Certificate
Manuals
Hook-up diagrams & Flow table
Applications
Reactive sputtering
- Fast follow-up of setpoints for layer thickness and transparency control
- Large dynamic range for flexibility within the application
Analytical equipment
- Trace Elemental Analysis, Gas Chromatography, ICP Spectroscopy, OES Spectroscopy, Mass Spectrometry
- Excellent repeatability and long-term stability
- Analytical grade; low outgassing. Fast flow control, also at very low flow rates.
Fuel cell
- Very accurate and repeatable over short-term and long-term for H2, Air, O2 and CO2 flow measurement and control
- Fast response flow measurement and control for accuracy at any time
- Large dynamic range flow measurement and control for accuracy over a wide flow range
- Compact for space-restricted mobile applications